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  • TESCOM™ 23 Series Springless Threadless Regulator
Tescom-P-23 Springless

TESCOM™ 23 Series Springless Threadless Regulator

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Product Description

23 Series ultra high purity in-line regulator offers 10 Ra microinch finish with high flow capabilities up to 950 SLPM. The tied diaphragm 23 Series provides an internally springless and threadless design with inlet pressure of 250 psig / 17.2 bar and outlet pressure up to 100 psig / 6.9 bar. Ideal for use in high flow in-line regulator excellent for purging.

Specifications

Pressure Rating
Maximum Inlet Pressure: 150 or 250 psig / 10.3 or 17.2 bar
Outlet Pressure Ranges: 0-30, 0-60, 0-100 psig / 0-2.1, 0-4.1, 0-6.9 bar
Material
Body: 316L VAR Stainless Steel with Electropolish
Valve Seat: Teflon® or PCTFE
Diaphragm & Stem: 316L Stainless Steel
Seal & Remaining Parts: 316 Stainless Steel
Operating Temperature
Teflon® Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Port Size & Type
Inlet & Outlet Port: 1/4 MVCR, fixed, 1/2 FVCR, 1/2 MVCR, 1/2 Tube, 3/4 Tube
Gauge Ports: 1/4 HPIC, 1/4 FVCR, 1/4 MVCR, fixed, 1/4 MVCR, swivel
Flow Capacity
Cv = 1.8
Weight
3.2 lbs / 1.5 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.

Features

  • Smooth unobstructed flow path for complete purging
  • Minimized particle generation because of springless and threadless construction
  • Positive shut-off seal with positionable bonnet
  • Excellent leak integrity is created by metal-to-metal diaphragm to body seal
  • Meets SEMI F19, UHP Grade

Documents & Drawings